Iinzwa zoxinzelelo ze-Semiconductor zinokuhlulwa zibe ngamacandelo amabini, enye isekelwe kumgaqo wokuba I-υ iimpawu ze-semiconductor PN junction (okanye i-schottky junction) iguquka phantsi koxinzelelo.Ukusebenza kwesi siqalelo soxinzelelo loxinzelelo aluzinzile kwaye alukaphuhliswa kakhulu.Enye inzwa esekelwe kwimpembelelo ye-semiconductor piezoresistive, eyona ntlobo iphambili ye-sensor ye-semiconductor yoxinzelelo.Kwiintsuku zokuqala, iigeyiji zoxinzelelo lwe-semiconductor zazincanyathiselwe ikakhulu kwizinto ezilastiki ukwenza uxinzelelo olwahlukeneyo kunye nezixhobo zokulinganisa ubunzima.Ngomnyaka we-1960, ngophuhliso lwetekhnoloji yesekethe edibeneyo ye-semiconductor, i-sensor ye-semiconductor yoxinzelelo kunye ne-diffusion resistor njengoko i-piezoresistive element ibonakala.Olu hlobo lwenzwa yoxinzelelo lunesakhiwo esilula kunye nesithembekileyo, akukho malungu ahambayo, kwaye into enoxinzelelo kunye ne-elastic element ye-sensor idibeneyo, ethintela i-mechanical lag kunye ne-creep kwaye iphucula ukusebenza kwenzwa.

Impembelelo ye-Piezoresistive ye-semiconductor Semiconductor inophawu oluhambelana namandla angaphandle, oko kukuthi, ukuxhathisa (okumelwa ngumqondiso ρ) utshintsho kunye noxinzelelo oluthwalayo, okubizwa ngokuba yi-piezoresistive effect.Utshintsho oluhambelanayo lokumelana nokuxhatshazwa phantsi kwesenzo soxinzelelo lweyunithi lubizwa ngokuba yi-piezoresistive coefficient, ebonakaliswa ngesimboli π.Libonakaliswe ngokwemathematika njengo-ρ/ρ = π σ.

Apho u-σ emele uxinzelelo.Utshintsho lwexabiso lokuchasana (R / R) olubangelwa ukuchasana kwe-semiconductor phantsi koxinzelelo luchongwa ngokukodwa ngokutshintsha kwe-resistantivity, ngoko ukubonakaliswa kwempembelelo ye-piezoresistive kungabhalwa kwakhona njenge-R / R = πσ.

Ngaphantsi kwesenzo samandla angaphandle, uxinzelelo oluthile (σ) kunye noxinzelelo (ε) lwenziwa kwiikristale ze-semiconductor, kwaye ubudlelwane phakathi kwabo buchongwa yi-Young's modulus (Y) yezinto eziphathekayo, oko kukuthi, Y=σ/ε.

Ukuba umphumo we-piezoresistive ubonakaliswe ngoxinzelelo kwi-semiconductor, ngu-R/R=Gε.

I-G ibizwa ngokuba yi-sensitivity factor ye-pressure sensor, emele utshintsho oluhambelanayo lwexabiso lokumelana phantsi koxinzelelo lweyunithi.

I-piezoresistive coefficient okanye i-sensitivity factor yi-parameter yomzimba esisiseko se-semiconductor piezoresistive effect.Ubudlelwane phakathi kwabo, njengobudlelwane phakathi koxinzelelo kunye noxinzelelo, luchongwa yi-Young's modulus yezinto eziphathekayo, oko kukuthi, g = π y.

Ngenxa ye-anisotropy ye-semiconductor crystals ku-elasticity, i-Young's modulus kunye ne-piezoresistive coefficient inguqu kunye nokuqhelaniswa nekristale.Ubungakanani bempembelelo ye-semiconductor piezoresistive nayo inxulumene ngokusondeleyo nokumelana ne-semiconductor.I-resistivity ephantsi, incinci i-sensitivity factor.Impembelelo ye-piezoresistive yokumelana nokusabalalisa inqunywe yi-crystal orientation kunye nokugxininiswa kokungcola kokuxhatshazwa kwe-diffusion.Ugxininiso lokungcola lubhekiselele kugxininiso lokungcola okungaphezulu komgangatho wokusabalalisa.