Ifanelekile kwiHitachi KM11 inzwa yoxinzelelo lweoyile EX200-2-3-5

Iitekhnoloji ezine zoxinzelelo lwenzwa yoxinzelelo

1. Ukukwazi

abenzi boxinzelelo be-capacitive badla ngokuthandwa linani elikhulu le-OEM yezicelo zobungcali. Ukubona utshintsho lwamandla phakathi kwemiphezulu emibini kuvumela ezi zivamvo ukuba zive uxinzelelo oluphantsi kakhulu kunye namanqanaba evacuum. Kubumbeko bethu boluvo oluqhelekileyo, ulwakhiwo lwezindlu olubambeneyo luneendawo ezimbini ezisondeleleneyo ezisondeleleneyo, ezinxuseneyo kunye nezombane ezibekwe zodwa ngombane, enye yazo eyidiaphragm enokugoba kancinci phantsi koxinzelelo. Ezi ndawo zigxininiswe ngokuqinileyo (okanye iipleyiti) zixhonywe ukwenzela ukuba ukugoba kwendibano kutshintshe umsantsa phakathi kwabo (okwenene ukwenza i-capacitor eguquguqukayo). Utshintsho olubangelwayo lufunyenwe yisekethe yomlinganisi obuthathaka kunye (okanye i-ASIC), eyandisa kwaye ikhuphe umqondiso wezinga eliphezulu.

2.CVD uhlobo

Ukubekwa komphunga wekhemikhali (okanye "i-CVD") indlela yokuvelisa iibhondi zepolysilicon umaleko ukuya kwidiaphragm yensimbi engenasici kumgangatho wemolekyuli, ngaloo ndlela ivelisa inzwa enomsebenzi ogqwesileyo wexesha elide wokukhukuliseka. Iindlela eziqhelekileyo zokwenziwa kwe-semiconductor ze-batch zisetyenziselwa ukwenza iibhulorho ze-polysilicon strain gauge kunye nokusebenza okugqwesileyo ngexabiso elifanelekileyo kakhulu. Ulwakhiwo lwe-CVD lunexabiso elincomekayo lokusebenza kwaye sesona sivamvo sithandwa kakhulu kwizicelo ze-OEM.

3. Uhlobo lwefilimu etshizayo

I-sputtering film deposition (okanye "ifilimu") inokudala inzwa enomgca ophezulu odibeneyo, i-hysteresis kunye nokuphindaphinda. Ukuchaneka kunokuba phezulu njenge-0.08% yesikali esipheleleyo, ngelixa i-drift yexesha elide iphantsi njenge-0.06% yesikali esipheleleyo minyaka yonke. Ukusebenza okungaqhelekanga kwezixhobo eziphambili-inzwa yethu yefilim ebhityileyo ephuthileyo bubutyebi kushishino lokubona uxinzelelo.

Uhlobo lwe-4.MMS

Ezi zivamvo zisebenzisa i-silicon ye-micro-machined (MMS) diaphragm ukubona utshintsho loxinzelelo. I-silicon diaphragm yodwa ukusuka kumbindi yi-316SS ezaliswe yi-oyile, kwaye basabela ngokulandelelana kunye noxinzelelo lwenkqubo yolwelo. Isivamvo se-MMS samkela itekhnoloji yokuvelisa i-semiconductor eqhelekileyo, enokufikelela ukuxhathisa amandla ombane aphezulu, umgca olungileyo, ukusebenza kakuhle komothuko we-thermal kunye nokuzinza kwi-compact sensor package.