Uluvo loxinzelelo sesinye sezona zivamvo zixhaphakileyo. Inzwa yoxinzelelo lwemveli ikakhulu isixhobo isakhiwo mechanical, kwaye deformation inxalenye elastic ibonisa uxinzelelo. Nangona kunjalo, ngenxa yobukhulu kunye nobunzima bazo, azikwazi ukuvelisa umbane.

Uphuhliso lweteknoloji ye-semiconductor luye lwakhokelela ekuveleni kweenzwa zoxinzelelo lwe-semiconductor. Ibonakaliswa ngobungakanani obuncinci, ubunzima obulula, ukuchaneka okuphezulu kunye nokusebenza kakuhle kweqondo lokushisa. Ngokukodwa ngophuhliso lwethekhnoloji ye-MEMS, i-semiconductor sensors iphuhlisa kwicala le-miniaturization, ukusetyenziswa kwamandla aphantsi kunye nokuthembeka okuphezulu.

Indima yeenzwa zoxinzelelo

1. Isetyenziselwa ngokuthe ngqo ukulinganisa uxinzelelo oluhlukeneyo: uxinzelelo lomoya, uxinzelelo lwe-hydraulic, uxinzelelo lwe-hydraulic (kubandakanywa noxinzelelo lwe-hydraulic), uxinzelelo lwegazi oluhlukeneyo kubomi bemihla ngemihla, njl .;

2. Izinzwa zoxinzelelo zisetyenziswa kwiimoto, ezinye izithuthuthu ze-elite kwaye phantse zonke iinjini zokutsha zangaphakathi;

3. Inqanaba lolwelo: Izixhobo zentsimi ezisetyenziselwa umlinganiselo wenqanaba lolwelo olwahlukeneyo ikakhulu zizivamvo zoxinzelelo;

4. Uninzi lweempawu ze-elektroniki kunye neempawu zokulinganisa isithuthi zivela kwiinzwa zoxinzelelo.

Izinzwa zoxinzelelo zisetyenziswa ikakhulu ukulawula nokubeka iliso kwizicelo ezithile. Kwishishini leemoto, i-MEMS i-sensors zoxinzelelo zisetyenziselwa ukulinganisa uxinzelelo lwamafutha, uxinzelelo lwetayara, uxinzelelo lwe-airbag, kunye noxinzelelo lwemibhobho. Kwintsimi ye-biomedical, ii-sensor ze-MEMS zoxinzelelo zisetyenziswa kakhulu kwiinkqubo zokuxilonga kunye nokufumanisa; Kwishishini le-aerospace, ii-sensors zoxinzelelo ze-MEMS zisetyenziselwa kakhulu ukulawula i-spacecraft kunye ne-spacecraft position;