Ulwakhiwo lwe-Piezoresistive Sensor

Kulo luvo, i-resistor strip ihlanganiswe kwi-monocrystalline silicon diaphragm ngenkqubo yokudibanisa ukwenza i-silicon piezoresistive chip, kwaye i-periphery yale chip ifakwe ngokusisigxina kwigobolondo, kwaye i-electrode iholele ngaphandle. Isivamvo soxinzelelo lwe-piezoresistive, ekwaziwa ngokuba yi-solid-state sensor sensor, yahlukile kwi-adhesive strain gauge, efuna ukuva amandla angaphandle ngokungangqalanga ngezinto ezibuthathaka ezilastiki, kodwa ziva ngokuthe ngqo uxinzelelo olulinganisiweyo nge-silicon diaphragm.

Elinye icala le-silicon diaphragm ngumgodi woxinzelelo oluphezulu onxibelelana noxinzelelo olulinganisiweyo, kwaye elinye icala ngumgodi ophantsi woxinzelelo onxibelelana nomoya. Ngokuqhelekileyo, i-silicon diaphragm iyilwe njengesangqa esine-periphery esisigxina, kwaye umlinganiselo we-diaphragm ukuya kubukhulu bu malunga ne-20 ~ 60. Imigca emine yokumelana nokungahlambuluki kwe-P isasazwe kwindawo kwi-silicon diaphragm ejikelezayo kwaye idityaniswe kwibhulorho epheleleyo, ezimbini zazo. bakwizowuni yoxinzelelo loxinzelelo kwaye ezinye ezimbini zikwindawo yoxinzelelo lwe-tensile, ezilinganayo ngokubhekisele kumbindi we-diaphragm.

Ukongeza, kukho isikwere se-silicon diaphragm kunye ne-silicon ikholamu yoluvo. I-silicon cylindrical sensor nayo yenziwe ngemicu yokuchasa ngokusasazwa kwicala elithile le-crystal plane ye-silicon cylinder, kunye nemicu emibini yoxinzelelo lwe-tensile kunye nemicu emibini yoxinzelelo yoxinzelelo yenza ibhulorho epheleleyo.

Inzwa ye-piezoresistive sisixhobo esenziwe ngokuxhathisa ukusabalalisa kwi-substrate yezinto ze-semiconductor ngokwempembelelo ye-piezoresistive yezinto ze-semiconductor. I-substrate yayo ingasetyenziswa ngokuthe ngqo njengenzwa yokulinganisa, kwaye ukuxhathisa ukusabalalisa kuxhunyiwe kwi-substrate ngendlela yebhuloho.

Xa i-substrate ikhutshazwa ngamandla angaphandle, amaxabiso okumelana aya kutshintsha kwaye ibhuloho iya kuvelisa imveliso engalinganiyo ehambelanayo. I-substrates (okanye i-diaphragms) esetyenziswa njenge-piezoresistive sensors ikakhulu zi-silicon wafers kunye ne-germanium wafers. Izinzwa ze-silicon piezoresistive ezenziwe ngee-silicon wafers njengezinto ezinovakalelo ziye zatsala ingqwalasela engakumbi nangakumbi, ngakumbi ezona zinzwa ze-piezoresistive zokulinganisa uxinzelelo kunye nesantya zezona zisetyenziswa kakhulu.