Isivamvo soxinzelelo lwe-excavator sesona sivamvo sisetyenziswa kakhulu, ligama eliqhelekileyo lokubona irhasi, ulwelo, okuqinileyo kunye nezinye izinto phakathi kwamandla e-inductive, ikwabandakanya
Iimanometers ezilinganisa uxinzelelo lomoya ngaphezulu kunye neegeji zokufunxa ezilinganisa uxinzelelo lomoya ngezantsi. Zininzi iindidi zesivamvo samandla, indlela yokulinganisa ngokwesiko kukusebenzisa i-deformation kunye nokususwa kwezinto ezilastiki ukubonisa ukugcinwa kwe-injini yokutofa yombane, kodwa umthamo wayo mkhulu, ubhityile, kwaye isiphumo asiyomda. Ngokukhula kwezakhono ze-microelectronics, ukusetyenziswa kwezixhobo ze-semiconductor impembelelo ye-piezoresistive kunye ne-elasticity ephezulu, ukuphuhliswa kwee-sensor zamandla e-semiconductor, i-silicon piezoresistive ebalulekileyo kunye ne-capacitive ezimbini, zinobukhulu obuncinci, ubunzima obulula, izibonelelo eziphezulu ze-sensitivity, zisetyenziswa ngokubanzi kumandla e-semiconductor. abenzi boluvo. Xa i-semiconductor igxininiswe phezulu kwikristale, ukuxhathisa kwayo kuya kutshintsha. Ubudlelwane phakathi kotshintsho lokumelana nomqhubi kunye noxinzelelo lubizwa ngokuba yi-semiconductor piezoresistive effect, kwaye i-sensor yobungakanani bomatshini eyenziwe kwesi siphumo ibizwa ngokuba yi-piezoresistive force sensor, eneentlobo ezimbini, enye yinzwa eyenziwe nge-semiconductor strain gauge encanyathiselwe kwi I-elastic element, ebizwa ngokuba yi-pasted piezoresistive sensor. Olunye luxhathiso losasazo olwenziwe ngetekhnoloji edityanisiweyo yesekethe kwi-substrate yezinto ze-semiconductor, ukuze igeyiji yoxinzelelo kunye ne-silicon substrate zenze inzwa efanayo yonke, ebizwa ngokuba yi-diffusion piezoresistive sensor. Ineempawu zobuntununtunu obuphezulu, ukuchaneka okuphezulu, ubungakanani obuncinci, ubunzima bokukhanya, i-frequency ephezulu yokusebenza, isakhiwo esilula, umsebenzi othembekileyo kunye nobomi obude.