Isebenza kwi-Special Sonssor Pressor Poil Sensor 06E905051K

1. Indlela yokwenza inzwa yoxinzelelo, equka:

Ukubonelela nge-semiconductor ye-semicondur, apho i-Interlather yokuqala ye-Interlather, i-Interlather yokuqala yeDirectric kunye ne-Interlather yesibini kunye nomnxibelelanisi wesibini wenziwa kwindawo ye-semiconductor.

Iplate ye-electrode esezantsi kwi-Interlather yokuqala ye-Dectritric, i-elektrode yokuqala ye-elektrode ibekwe kwiplate ye-electrode ephantsi kunye nendawo eyahlukileyo.

Ukudibanisa amanyembane;

Ukwenza ungqimba ngedini ngaphezulu kweplate yesezantsi;

Ukwenza iplate ye-electrode ephezulu kwi-Interlather yokuqala yeDepritric, ungqameko lokuqala kunye nongqimba lwedini;

Emva kokwenza umaleko wedini kwaye ngaphambi kokuba wenze iplate ephezulu, kwi-theraction yokuqala

Ukwenza uqhagamshelo roove, kwaye ugcwalise uqhagamshelo lwe-roove ngeplate ephezulu kunxibelelwano ngombane kunye nomaleko wokuqala; Okanye,

Emva kokwakha iplate ye-elektrode ye-electrode, ii-rooves zenziwa kwiplate ephezulu ye-electrode kunye ne-ratenaction yokuqala, nto leyo

Ukwenza umaleko olwenziwayo aqhagamshela iplate ye-elektrode ephezulu kunye nomaleko wokuqala kwi-roove;

Emva kokuqhagamshela kombane kwiplate ephezulu kunye nomaleko wokuqala wokunxibelelana, esusa i-famist yedini ukwenza i-cavity.

2. Indlela yokwenza inzwa yoxinzelelo ngokwebango loku-1, apho kwi-sueter yokuqala

Indlela yokwenza ukuba ubeke idini ledini kumnxibelelanisi weDarlitric Deechric uquka la manyathelo alandelayo:

Ifake umaleko wezinto ezibonakalayo kwidini le-Interlayer yokuqala;

Ukujikeleza umaleko wezinto eziphathekayo ezenziwe ngedini ukwenza ungqimba lwedini.

3. Indlela yokwenza inzwa yoxinzelelo ngokwebango 2, apho ifoto yeFotthography isetyenziswa.

Umaleko wezinto ezibonakalayo zedini ngu-ofting yenkqubo yokuphuma.

4. Indlela yokwenza inzwa yoxinzelelo ngokwebango lesi-3, apho kuyekiswa khona

Umxholo yi-Amorphous Carbon okanye i-jenjaum.

5. Indlela yokwenza inzwa yoxinzelelo ngokwebango 4, apho kuyekiswa khona

Izinto ze-amorphous carbon;

Igesi ethatyathwa igesi esetyenziswayo kwinkqubo yokuphumeza umaleko wezinto ezibonakalayo ezinokubandakanya i-O2, i-CO, N2 ne-AR;

Iiparameter kwinkqubo yokuphumeza umaleko wezinto ezimbi zedini le: Uluhlu lwe-O2 luyi-18 sccm ~ 22 i-SCCM, kunye nenqanaba lokuhamba kwe-CO liyi-10%.

Ireyithi yokuhamba ukusuka kwi-90 SCCm ukuya kwi-110 i-SCCm, ireyithi yokuhamba ye-N2 isuka kwi-90 ye-SCCM ukuya kwi-110 i-SCCm, kunye nenqanaba lokuhamba kwe-AR.

Uluhlu lungama-90 sccm ~ 110 i-SCCm, uluhlu loxinzelelo ngama-90 i-MTR ~ 110 Mtor, kunye namandla eNias

I-540w ~ 660i.