I-Sensor ye-Injini 2CP3-68 1946725 yeCarter Excavator

Indlela yokulungiselela inzwa yeXabiso, ibonakaliswa ngokubandakanya la manyathelo alandelayo:

S1, ukubonelela ngomphezulu womphezulu kunye nomphezulu wangaphambili; Ukwenza umtya we-picoresstive kunye nendawo yoqhakamshelwano olwenziweyo kakhulu onthe wangaphambili we-wafer; Ukwenza uxinzelelo lwe-cavity enzulu ngokukhonkotha umphezulu we-wafer;

I-S2, ibopha iphepha lenkxaso ngasemva kwe-wafer;

I-S3, imveliso yemingxunya ekhokelayo kunye neengcingo zentsimbi kwicala elingaphezulu kwe-wafer, kunye nokudibanisa imitya ye-piezorestive ukwenza ibhulorho yelanga;

I-S4, ifakelweyo kwaye yenze umaleko wepaseji kumphezulu wangaphambili we-wafer, kunye nokuvula inxenye yomaleko ukwenza indawo ye-PAD. 2. Indlela yokuFuma kweMveliso yeNzululwazi yokuFumana ibango 1, apho i-S1 iquka la manyathelo alandelayo: S11: ukubonelela ngomphezulu wefilimu engasemva kunye nokuchaza ubukhulu befilimu enoxinzelelo; S12: Indawo yokubeka i-Iyon isetyenziswa kumphezulu wangaphambili we-wafer, i-piezorestive imizisela yenziwa yinkqubo yobunzima bobushushu, kwaye imimandla yoqhakamshelwano igcinwe kakhulu; I-S13: ifakelwe kwaye yenze umaleko okhuselayo kumphezulu wangaphambili we-wafer; S14: I-etha kwaye yenze ingcinezelo ye-cavity enzulu ngasemva kwe-wafer ukwenza ifilimu ethobekileyo. I-3. Indlela yokwenziwa kwemveliso yenzwa yesine

Ngo-1962, Tufte et al. Yenza i-Piezoresive yoxinzelelo lwe-Piezores Ngasekupheleni kweminyaka yee-1960 nasekuqalekeni kweminyaka yoo-1970, ukubonakala kweetekhnoloji ezintathu zetekhnoloji, eyokuthi, itekhnoloji ye-Anisotropic ye-ETCHIC, itekhnoloji yokuthengisa itekhnoloji ye-Anoding, eyayidlale itekhnoloji ebalulekileyo ekuphuculeni intsebenzo yenzwa yenzwa yenzwa. Ukususela ngo-1980, kunye nophuhliso oluqhubekayo lwetekhnoloji ye-Micromachic, enjenge-Anisotropic ye-Anisotropic, i-Litho-Intersution, i-Into ye-Is, i-Into iphuculwe, kwaye impembelelo iphezulu kwaye intsebenzo igqibelele. Kwangelo xesha, uphuhliso kunye nokusetyenziswa kwetekhnoloji ye-Micromaching entsha kwenza ukuba ubukhulu befilimu bulawulwa ngokuchanekileyo.